
TSMC to Mass-Produce 1.4nm Chips in Late 2028, Skipping Next-Gen EUV Unlike Intel
TSMC's 1.4nm process (A14) is on track for trial production in 2027 and mass production in 2028. The company will forgo High-NA EUV in favor of Low-NA multi-patterning and NanoFlex Pro, while A13—arriving in 2029 with a 97% optical shrink—aims to deliver an edge in yield and cost efficiency.








