
Fact-Checking NAURA's '500x Selectivity' Claim in China's 3D DRAM Etching Breakthrough
China's NAURA presented a SiGe/Si selective etching technology for 3D DRAM at CSTIC 2026, claiming over 500x selectivity at 64 layers—but the equipment model, throughput, and CXMT adoption remain undisclosed and unverified.








