
RIKEN Team Raises EUV Laser Conversion Efficiency 40% With Dual-Beam Method, Tackling Chipmaking's Power Problem
RIKEN and collaborators have demonstrated a multi-laser irradiation method for generating EUV light from a 2µm solid-state laser. Using a tin flat-plate target, the technique raised conversion efficiency from 2.6% to 3.6% at the same total energy.








