
Chinese-Made Immersion DUV Reportedly Starts Production at 5 Units a Year: Customer Qualification Is the Gatekeeper for Replacing ASML
A Chinese state-linked firm has reportedly begun producing immersion DUV lithography systems at a scale of about five units a year, with deliveries planned to SMIC and others. Replacing ASML will require verified precision and uptime at customer fabs, plus stable component supply.








